直径150mm碲锌镉晶体生长温场控制研究OA

Cadmium zinc telluride(CZT)is a crucial material in the fields of infrared detection and nuclear radiation detection,garnering significant attention as a foundational material for manufacturing next-generation ultra-large array detectors.To address the technical challenges in growing 150 mm diameter CZT crystals via the Vertical gradient freeze(VGF)method,finite element simulation was employed to regulate the heater output power during the crystal growth process.This approach enabled precise control over the temperature field during CZT crystal growth,achieving a convex solid-liquid interface shape throughout the entire growth process.Consequently,high-quality 150 mm diameter CZT single crystals were successfully grown.The grown crystals enabled the preparation of 100 mm×100 mm infrared CZT substrates.Test results demonstrate uniform composition distribution in the CZT crystals.The full width at half maximum(FWHM)of the rocking curve for the(111)plane of the CZT substrates is below 15″,and the average etch pit density(EPD)is less than 1×104 cm-2.