金刚石线锯的制备及使用性能综述OA
Review of preparation and performance of diamond wire saws
金刚石因其高硬度、高导热性、高耐磨性和良好的化学惰性,广泛应用于半导体材料切割领域.本研究旨在系统总结电镀、树脂结合剂和钎焊3种金刚石线锯制备技术的现状,比较3种制备工艺在母线类型、结合方式、金刚石磨粒特性、制备装置及关键工艺参数等方面的技术特点,分析其在性能和应用中的优势与局限,并针对存在的技术难点提出改进方向,助力提升金刚石线锯的综合性能.结果表明:电镀金刚石线锯由于其制备工艺成熟,在光伏硅晶体、蓝宝石和大理石等领域已实现大规模应用,但其结合强度较低,限制了其在高硬度材料(如SiC和蓝宝石)切割中的寿命和效率;树脂结合剂金刚石线锯具有较高的断裂强度、扭转强度和弯曲强度,且磨粒突出高度一致,可用于多种材料的切割,但其中树脂的耐热性和耐磨性不足,限制了其在高速切割中的应用;相比之下,钎焊金刚石线锯通过冶金结合显著提升了结合强度,在切割性能和耐用性方面优于前2种技术,但钎焊工艺存在金刚石石墨化损伤和母线力学性能下降等技术瓶颈,仍需进一步研究和改进.综上所述,3种金刚石线锯技术在不同应用领域各有优势,但均存在技术瓶颈.未来需进一步优化制备工艺,提升性能并拓展其应用范围.
Objectives:Diamond,renowned for its exceptional hardness,high thermal conductivity,remarkable wear resistance,and chemical inertness,has become indispensable in the cutting of semiconductor materials such as silicon carbide(SiC),sapphire,and gallium nitride.As demand for these advanced materials grows in the electronics and optoelectronics industries,the performance requirements for cutting tools become increasingly stringent.This paper aims to provide a systematic review of the current state of three primary diamond wire saw preparation technologies:electroplating,resin bonding,and brazing.The objective is to critically analyze and compare these fabrication methods,elucidating their respective principles,advantages,limitations,and influence on cutting performance across different applications.Furthermore,by identifying key technical challenges,this review proposes viable directions for future research and process optimization to enhance the comprehensive performance of diamond wire saws.Methods:This study undertakes a thorough review of existing literature,encompassing key research findings from both domestic and international academic sources.The methodology involves a structured comparative analysis of the three preparation technologies,examining their specific technical characteristics,including base wire materials,bonding mechanisms between diamond abrasives and the substrate,diamond grit properties(size,shape,concentration,and surface condition),preparation apparatus,and critical process parameters.Beyond technical description,this review analyzes the performance of the resulting wire saws during actual cutting operations,evaluating key indicators such as cutting efficiency,surface quality of sliced wafers,tool wear mechanisms,lifespan,and cutting stability.By correlating manufacturing parameters with performance outcomes,the primary factors influencing the efficacy of each wire saw type are identified and discussed.Results:Electroplated diamond wire saws,owing to their mature and well-established preparation process achieve large-scale industrial application in cutting materials such as photovoltaic silicon crystals,sapphire,and marble.However,a significant limitation lies in the relatively low bonding strength between the diamond grits and the substrate,which restricts the tool's lifespan and cutting efficiency when processing high-hardness materials like silicon carbide(SiC)and sapphire.Nevertheless,their inadequate heat resistance and wear resistance constrain their applicability in high-speed cutting scenarios.In contrast,brazed diamond wire saws achieve substantially enhanced bonding strength through a metallurgical bond between the diamond and the matrix.This results in superior cutting performance and durability compared to the other two technologies.Despite these advantages,the brazing process itself presents technical bottlenecks,notably thermal damage to the diamond grits,such as graphitization,and a decline in the mechanical properties of the base wire,necessitating further research and process optimization.Conclusions:Diamond wire saw technology evolves along three distinct paths,each offering unique advantages and limitations that determine suitability for specific cutting tasks.Electroplated saws dominate current industrial practice due to maturity and low cost but are performance-limited by low bond strength for ultra-hard materials.Resin-bonded saws provide flexibility and good surface finish but are constrained by poor thermal stability.Brazed saws offer the highest theoretical performance due to superior metallurgical bonding but face challenges related to thermal damage to both the diamond and the wire substrate.Future research should focus on overcoming these barriers:for brazed wires,developing novel filler alloys with lower melting points to mitigate thermal damage and implementing advanced thermal management strategies;for electroplated and resin-bonded wires,exploring composite matrices and modified resins with enhanced thermal conductivity.Through these targeted improvements,the comprehensive performance of diamond wire saws can be significantly elevated to meet the increasing demands of advanced material processing industries.
陈昌初;何文民;武作杰
三明技师学院,福建 永安 366000厦门大学 信息学院,福建 厦门 361005宁德时代新能源科技股份有限公司,福建 宁德 352100
化学化工
金刚石线锯电镀树脂结合剂钎焊
diamond wire sawelectroplatingresin binderbrazing
《金刚石与磨料磨具工程》 2026 (1)
50-61,12
国家自然科学基金(52075461).
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