基于WLCSP封装的应力分析和重布线层结构优化OA
Stress Analysis and Redistribution Layer Structural Optimization Based on WLCSP
晶圆级芯片封装(WLCSP)通过引入重布线层(RDL)有效提高I/O密度,是实现高密度、高性能封装的重要技术之一.WLCSP器件在服役期间要经受较大的温度变化,受到不同材料热膨胀系数失配的影响,进而容易产生分层和开裂,甚至导致封装互连失效.芯片互连失效的根本原因是应力过大,顶层金属(TM)的不均匀性会严重影响应力大小.基于此失效问题,研究了 WLCSP结构中RDL和TM的稀疏程度、稀疏位置、RDL连续性以及芯片结构对应力的影响,并针对WLCSP结构中芯片失效问题给出规律性总结和优化建议.研究结果表明,1P2M的RDL和TM分布不均匀对应力均有很大影响,RDL和TM稀疏位置对芯片应力影响不大,RDL连续性越好应力越小,TM稀疏面积越大应力越大;相比1P2M结构,2P2M结构能明显降低芯片应力,TM分布不均匀对芯片应力影响不大,而RDL的分布不均对芯片应力影响较大.
Wafer-level chip-scale packaging(WLCSP)leverages the redistribution layer(RDL)to markedly increase the I/O density,making it a key technology for achieving high-density,high-performance packaging.During service,WLCSP devices experience pronounced temperature excursions.The mismatch in coefficients of thermal expansion(CTE)among dissimilar materials induces delamination,cracking,and ultimately packaging interconnection failure.The root cause of chip interconnect failure is excessive stress,and variations in the top-metal(TM)layer can significantly affect the magnitude of this stress.Based on this failure issue,the impact of the degree and location of sparsity in both the RDL and TM,RDL continuity,and chip structure stress in WLCSP structures is systematically investigated,and a systematic summary of chip failure issues in WLCSP structures and recommendations for optimization are provided.The results indicate that the non-uniform distributions of RDL and TM in 1P2M have a significant impact on stress,the precise sparse location within each layer has limited impact,the better the RDL continuity,the lower the stress,the larger the sparse area of the TM,the higher the stress.Compared to the 1P2M structure,the 2P2M structure significantly reduces chip stress,non-uniform TM distribution has little effect on chip stress,whereas non-uniform RDL distribution has a significant impact on chip stress.
张春颖;江伟;刘坤鹏;薛兴涛;林正忠
盛合晶微半导体(江阴)有限公司,江苏无锡 214437盛合晶微半导体(江阴)有限公司,江苏无锡 214437盛合晶微半导体(江阴)有限公司,江苏无锡 214437盛合晶微半导体(江阴)有限公司,江苏无锡 214437盛合晶微半导体(江阴)有限公司,江苏无锡 214437
信息技术与安全科学
仿真晶圆级芯片封装芯片应力重布线层顶层金属
simulationWLCSPchip stressRDLtop-metal
《电子与封装》 2026 (3)
108-114,7
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