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微区域角分辨光谱测量系统OA

Micro-area angle-resolved spectroscopy measurement system

中文摘要英文摘要

为研究表面等离激元纳米结构的微区域光学响应,本文研制了一套基于同轴转臂的微区域角分辨光谱测量系统.该系统设计了一种基于有限共轭构型的微区域远程激发与收集光路模型,实现了以 32 μm直径的微区域光斑入射;搭建了基于同轴转臂的角分辨机械系统,实现了 6.9° 至 90° 的大范围定向角度激发.性能测试表明,系统稳定性高,最小角度分辨率达 0.12°.通过对一维光栅和二维周期纳米结构的反射光谱采集实验,进一步验证了系统的可靠性,证明了微区域光斑所带来的优势,为微纳结构的角分辨光谱表征提供了有效的技术手段.

To study the optical response of micro-area in surface plasmon nanostructures,we develop a mi-cro-area angle-resolved spectroscopy measurement system based on a coaxial rotating arm.The system ad-opts a micro-area remote excitation and collection optical path model based on a finite conjugate configura-tion,enabling an incident micro-area spot with a diameter of 32 μm.In addition,an angle-resolved mechanic-al system based on a coaxial rotating arm is constructed,realizing large-range directional angular excitation from 6.9° to 90°.Performance tests show that the system exhibits high stability,with a minimum angular res-olution of 0.12°.Through the reflection spectrum collection experiments on one-dimensional gratings and two-dimensional periodic nanostructures,the reliability of the system is further verified.The results demon-strate the advantages of the micro-area spot,which provide an effective technical means for the angle-re-solved spectroscopy characterization of micro and nanostructures.

吴祖伟;高云;朱鹏飞;章文卓;王磊

泉州工艺美术职业学院 陶瓷工程学院,福建 泉州 362500||厦门大学 萨本栋微米纳米科学技术研究院,福建 厦门 361102厦门大学 萨本栋微米纳米科学技术研究院,福建 厦门 361102||安庆师范大学 智能感知与计算高等学校重点实验室,安徽 安庆 246133厦门大学 萨本栋微米纳米科学技术研究院,福建 厦门 361102泉州工艺美术职业学院 陶瓷工程学院,福建 泉州 362500||厦门大学 萨本栋微米纳米科学技术研究院,福建 厦门 361102厦门大学 萨本栋微米纳米科学技术研究院,福建 厦门 361102

数理科学

微区域光斑角分辨光谱测量谱学仪器表面等离激元

micro-area light spotangle-resolved spectroscopy measurementspectroscopic instrumentsur-face plasmons

《中国光学(中英文)》 2026 (2)

277-287,11

福建省中青年教师教育科研项目(科技类)(No.JAT241360)安徽省教育厅青年科学项目(No.2025AHGXZK40354)厦门市产学研项目(No.2024CXY0110)Supported by Fujian Province Young and Middle-Aged Teachers Education Research Project(Science and Technology)(No.JAT241360)Youth Scientific Research Project(Natural Science)of the Education Depart-ment of Anhui Province(No.2025AHGXZK40354)Xiamen Industry-University-Research Project(No.2024CXY0110)

10.37188/CO.2025-0148

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