射频波导CO2激光放大技术OA

Toward the application demand for high-power,high-beam-quality CO2 seed lasers in extreme ul-traviolet lithography light sources,the CO2 laser amplification technology were investigated based on a radio-frequency(RF)waveguide architecture.On one hand,The static insertion loss and output beam quality of the RF waveguide amplifier were measured as a function of incident beam parameters and the optimal mode-matching parameters were determined.On the other hand,a numerical model of the multi-stage RF wave-guide amplification was developed to evaluate the effects of the gas pressure and the discharge pumping power on the amplification factor.The technology of regulating with gain medium was implemented to op-timize the amplification performance in the experiment.The experimental results indicate that the optimal mode-matching conditions were identified with a waveguide length of 2.5 m,yielding a transmission effi-ciency of 91.4％.The beam quality factors of the output beam in the horizontal and vertical directions were 1.03 and 1.05,respectively.An overall amplification factor of 68×was achieved in a dual-stage RF wave-guide amplifier.The system delivered CO2 laser emission with a repetition rate of 50 kHz,a pulse duration of 20 ns,and an average output power of 17.1 W,satisfying the design criteria and demonstrating its suitability for high-power,high-beam-quality seed laser applications.