扫频连续波太赫兹近场成像系统OA

Limited by the diffraction limit,the theoretical limit of spatial imaging resolution for far-field terahertz imaging technology is half the wavelength,which fails to meet the testing requirements for the characterization of microscale information in materials.To address the application needs of micro-nano defect detection in new materials such as semiconductor materials and ordered structural materials,this paper designs a wide-bandwidth frequency-swept continuous-wave terahertz near-field imaging system.The system adopts an all-electronic integrated terahertz transceiver module,and through terahertz beam spatial synthesis,it achieves seamless coverage of the test frequency range from 0.11 to 1.10 THz with a frequency resolution of 1 Hz.Via multi-frequency point information fusion,micro-nano defect detection and identification in materials are realized,with a spatial imaging resolution of ≤100 nm,the imaging field of view reaches 100 μm × 100 μm.Tests and characterizations on semiconductor materials and ordered structural materials verify that the system in this paper can obtain high-quality near-field images by selecting terahertz frequency points at which the test materials exhibit strong responses to the high-resolution frequency-swept continuous wave.