纳米银键合的石墨烯压力传感器可靠性研究OA

With the rapid development of MEMS sensor devices,the reliability problem has gradually become a critical issue for the application of MEMS sensor devices in military and other fields.In order to systematically study the reliability and stability of graphene high-temperature pressure sensors in harsh environments such as high temperature and high humidity for a long period of time,the quality of nanosilver bonding of graphene high-temperature pressure sensors and the reliability of sensors are evaluated from the aspects of high-temperature thermal storage,temperature and humidity cycling and other environmental loads in the con-text of the sensor device's working environment,respectively.The results of the high-temperature thermal storage experiments show that the nanosilver bonding shear strength is slightly reduced,and the airtightness is better than before.In addition,the results of long-term stability experiments showed that the fundamental resistance of the sensor did not change significantly.Therefore,the nanosilver bonding has better strength and airtightness,which makes the sensor still perform well under different loading environ-ments.This study can illustrate that the nanosilver bonding can be applied in complex and harsh environments such as high tempera-ture and high humidity,which lays the foundation for the application of graphene high-temperature pressure sensors in complex en-vironments such as high temperature and high humidity.