Femtosecond laser-induced sub-50-nm period nanogratings with ultrahigh uniformity on graphite under water immersionOA
Femtosecond laser-induced sub-50-nm period nanogratings with ultrahigh uniformity on graphite under water immersion
Qingyu Li;Feng Zhou;Min Huang
State Key Laboratory of Optoelectronic Materials and Technologies,School of Physics,Sun Yat-sen University,Guangzhou 510275,People's Republic of ChinaState Key Laboratory of Optoelectronic Materials and Technologies,School of Physics,Sun Yat-sen University,Guangzhou 510275,People's Republic of ChinaState Key Laboratory of Optoelectronic Materials and Technologies,School of Physics,Sun Yat-sen University,Guangzhou 510275,People's Republic of China
deep-subwavelength gratingfemtosecond laser processingwater immersionultrahigh uniformityhighly oriented pyrolytic graphite
deep-subwavelength gratingfemtosecond laser processingwater immersionultrahigh uniformityhighly oriented pyrolytic graphite
《极端制造（英文）》 2026 (1)
573-600,28
The authors are grateful to Liu Yanfa for his support in the maintenance and use of fs lasers,to Ding Cairong for her support in SEM and FIB-SEM characterization,and to Zeng Xueran for his support in MRS characteriza-tion.This work has been supported by grants from Natural Science Foundation of Guangdong Province(Grant No.2021A1515012335)National Natural Science Foundation of China(NSFC)(Grant No.11274400)Pearl River S&T Nova Program of Guangzhou(Grant No.201506010059)State Key Laboratory of Optoelectronic Materials and Technologies(Sun Yat-Sen University)(Grant No.OEMT-2024-ZTS-01)State Key Laboratory of High Field Laser Physics(Shanghai Institute of Optics and Fine Mechanics).
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