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外延展螺旋形绝对式时栅角位移传感原理及器件OA

Absolute angular displacement sensing principle and sensors based on time grating with extended spiral

中文摘要英文摘要

针对传统绝对式角位移传感器在设计和加工过程中存在绝对编码和超精密光刻加工的问题,提出一种外延展螺旋形绝对式时栅角位移传感方法.先将定子内外圈布置由外延展螺旋形线圈构成空间正交且对极数互质的两组正弦激励绕组和余弦激励绕组.再采用时分复用的时间正交激励信号构建交变磁场,降低电磁串扰,构建时间与空间角位移的映射关系.最后利用感应绕组拾取磁场变化,获取位移信号,采用"定位+测量"组合的测量方法实现绝对角位移测量.实验结果表明,传感器在360°内的绝对测量误差为±11.20″.本方法采用万角秒级传感尺寸单元实现角秒级精度的绝对位置测量,摆脱了绝对编码和超精密光刻加工对传统绝对式位移传感器的制约,大大降低了制造难度,可用于强油污等恶劣环境的角位移测量,具有重要的学术价值和工程应用价值.

To address the limitations associated with absolute coding and ultra-precision photolithography in the design and fabrication of traditional absolute angular displacement sensors,a novel time-grating-based absolute angular displacement sensing method employing an extended spiral structure is proposed.Two sets of sinusoidal and cosine excitation windings with extended spiral geometries were ar-ranged on the inner and outer rings of the stator.These windings are spatially orthogonal and possess oppo-site pole numbers.An alternating magnetic field was generated using time-orthogonal excitation signals through time-division multiplexing,effectively reducing electromagnetic crosstalk and establishing a map-ping relationship between temporal signals and spatial angular displacement.Variations in the magnetic field were detected by induction windings to obtain displacement signals,and absolute angular displace-ment was determined using a combined"positioning+measurement"strategy.Experimental results indi-cate that an absolute measurement error of±11.2″ was achieved within a full 360° range.Arcsecond-level absolute position measurement was realized using sensing units with ten-thousand-arcsecond resolution,thereby eliminating the dependence of traditional absolute displacement sensors on absolute coding and ultra-precision photolithography while significantly reducing manufacturing complexity.The proposed method is suitable for angular displacement measurement in harsh environ-ments such as those contaminated by oil,demonstrating significant academic relevance and engineering ap-plication potential.

陈自然;张子仪;郑永海;何智颖;史立业;何志林;杨旭

重庆理工大学 机械检测技术与装备教育部工程研究中心,重庆 400054||时栅传感及先进检测技术重庆市重点实验室,重庆 400054重庆理工大学 机械检测技术与装备教育部工程研究中心,重庆 400054||时栅传感及先进检测技术重庆市重点实验室,重庆 400054重庆理工大学 机械检测技术与装备教育部工程研究中心,重庆 400054||时栅传感及先进检测技术重庆市重点实验室,重庆 400054重庆理工大学 机械检测技术与装备教育部工程研究中心,重庆 400054||时栅传感及先进检测技术重庆市重点实验室,重庆 400054重庆理工大学 机械检测技术与装备教育部工程研究中心,重庆 400054||时栅传感及先进检测技术重庆市重点实验室,重庆 400054重庆理工大学 机械检测技术与装备教育部工程研究中心,重庆 400054||时栅传感及先进检测技术重庆市重点实验室,重庆 400054重庆理工大学 机械检测技术与装备教育部工程研究中心,重庆 400054||时栅传感及先进检测技术重庆市重点实验室,重庆 400054

信息技术与安全科学

绝对角位移时栅外延展螺旋形时分复用对极数互质

absolute angular displacementtime gratingextrapolation spiral shapetime division multi-plexingcoprime exponents

《光学精密工程》 2026 (5)

784-793,10

国家重点研发计划资助项目(No.2023YFB3209400)国家自然科学基金资助项目(No.52175495,No.52475549)重庆市自然科学基金资助项目(No.CSTB2023NSCQ-LZX0088)

10.37188/OPE.20263405.0784

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