基于多测头的反射镜面形检测OA

To address the limitation that conventional single-probe measurement methods used during the grinding stage of optical components are highly sensitive to machine tool guideway motion errors and strug-gle to balance measurement accuracy with in-situ measurement efficiency,a multi-probe non-contact sur-face form measurement method suitable for integration with conventional machine tools is proposed,en-abling high-precision in-situ measurement during the grinding process of optical components.First,the dif-ferential measurement principle of a multi-probe system composed of three laser displacement sensors is in-troduced.By performing pairwise differencing among the three probes,the influence of machine tool guideway motion errors is effectively suppressed,and the displacement differences are transformed into lo-cal surface slope information.Subsequently,a surface reconstruction approach based on Zernike polynomi-al slope fitting is described,in which the full-aperture surface form is reconstructed from the measured slope field using a least-squares fitting method.A geometric simulation model of the measurement system is then established,and the effects of probe position and orientation errors on the reconstructed surface are analyzed using the Monte Carlo method.Furthermore,Sobol global sensitivity indices are employed to quantitatively evaluate the contributions of different error sources to the RMS error,providing guidance for system alignment tolerance allocation and error control strategies.Experimental validation is conducted on a Φ400 mm diameter single-crystal silicon plane mirror during the grinding stage.The measurement re-sults obtained using the proposed multi-probe system are compared with those from a coordinate measuring machine(CMM).The results indicate that the absolute deviation of the peak-to-valley(PV)value is 0.21 μm,corresponding to a relative deviation of 2.22%,while the absolute deviation of the root mean square(RMS)value is 0.14 μm,corresponding to a relative deviation of 7.78%.These results demon-strate that the proposed method maintains good measurement consistency and stability under machine tool operating conditions and provides a practical non-contact surface form measurement solution for high-preci-sion in-situ measurement during the grinding stage of optical components.