晶圆制造薄膜车间的对象Petri网和人工势场调度优化方法OA

To address the scheduling optimization challenge in wafer fabrication thin-film workshops,where robot path planningis tightly coupled with machine resource allocation,a method that can obtain high-quality scheduling solutions within limited computation time is proposed.An object Petri Net model is constructed to integrate robot path,machine processing,and task workflows into a unified framework.A time-consumption-based artificial potential field is designed,in which task demand intensity is introduced to dynamically charac-terize resource urgency.Meanwhile,a relationship between the amplification factor and the potential field function is proposed to enhance the utilization of high-cost equipment.Based on these designs,an artificial po-tential field guided A* search algorithm is developed.Experimental results show that,for small-scale tasks,the proposed method achieves the same optimal solution as the Dijkstras algorithm while improving search effi-ciency by approximately 96％.In complex multi-robot scenarios,where Dijkstra fails due to state-space explo-sion,the proposed method is still able to generate near-optimal scheduling solution within minutes.