面向柔性触觉感知的高精度毫牛级力传感器OA
High-Precision Millinewton-Level Force Sensor for Flexible Tactile Perception
随着各种智能装备的兴起,对于柔性界面微弱力的测量及其测量的精确度提出了更高的要求.提出了一种将悬臂梁作为灵敏元件结合激光测距的压向力传感器,并分析了其结构特点和测量原理.通过天平标定实验得到悬臂梁挠度与所受力值的拟合关系,进而由悬臂梁挠度得到精确压向力值,最终通过验证实验对该传感器性能进行验证.实验结果表明,在 0～120 mN范围内,对于以硅胶材料为代表的柔性施力物体有良好的测量性能,所提述传感器的灵敏度可以达到 0.060 7 mm/mN,测量分辨率可以达到0.13 mN,重复性误差小于1.51％.
With the rise of various intelligent equipment,higher requirements have been put forward for the measurement and accuracy of weak forces on flexible interfaces.A pressure-sensitive sensor isproposed,which combines a cantilever beam as a sensitive element with laser ranging,and its structural characteristics and measurement principles are analyzed.The relationship between the deflection of the cantilever beam and the applied force is obtained through a balance calibration experiment,and precise pressure values are derived from the deflection of the cantilever beam.Finally,the performance of the sensor is validated through verification experiments.The ex-perimental results show that in the range of 0～120 mN,the sensor has good measurement performance for flexible force objects repre-sented by silicone materials.The sensitivity of the sensor described can reach 0.060 7 mm/mN,the measurement resolution can reach 0.13 mN,and the repeatability error is less than 1.51％.
李佳慧;汪永其;鲜欣妍;魏霄怡;朱周洪;赵天琦;甘海勇;沈常宇
中国计量大学光学与电子科技学院,浙江 杭州 310018中国计量大学光学与电子科技学院,浙江 杭州 310018中国计量大学光学与电子科技学院,浙江 杭州 310018中国计量大学光学与电子科技学院,浙江 杭州 310018中国计量大学光学与电子科技学院,浙江 杭州 310018中国计量大学光学与电子科技学院,浙江 杭州 310018中国计量科学研究院,北京 100029中国计量大学光学与电子科技学院,浙江 杭州 310018
信息技术与安全科学
力传感器毫牛力悬臂梁柔性物体
force sensormillinewton forcecantilever beamflexible object
《传感技术学报》 2026 (2)
238-243,6
国家重点研发计划项目(2021YFF0600203)国家自然科学基金项目(12574330,12274386)
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