Flexible ITO TFTs with high mobility of 39.1 cm2·V-1·s-1 and excellent uniformity fabricated via mass-production compatible processOA
Flexible ITO TFTs with high mobility of 39.1 cm2·V-1·s-1 and excellent uniformity fabricated via mass-production compatible process
Zuoxu Yu;Runxiao Shi;Wangran Wu;Yuzhen Zhang;Tingrui Huang;Wenting Xu;Mingming Liu;Di Gui;Kaizhi Sui;Guangan Yang;Weifeng Sun
School of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,China
InSnOthin film transistorlarge-scale uniformityflexibility
InSnOthin film transistorlarge-scale uniformityflexibility
《半导体学报（英文版）》 2026 (3)
72-80,9
The work is supported in part by the National Natural Sci-ence Foundation of China(62274033),Natural Science Founda-tion of Jiangsu Province(BK20221453),and Fundamental Research Funds for the Central Universities.
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