A distributed static model of capacitive MEMS microwave power detection chipOA
A distributed static model of capacitive MEMS microwave power detection chip
Ruifeng Li;Debo Wang
College of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,ChinaCollege of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,China
MEMSpower detectioncantilever beamstatic modelsensitivity
MEMSpower detectioncantilever beamstatic modelsensitivity
《半导体学报（英文版）》 2026 (3)
54-64,11
This work was supported by the National Natural Sci-ence Foundation of China(61904089),and the Province Natu-ral Science Foundation of Jiangsu(BK20190731).
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