Contrastive learning for data-efficient substrate deoxidation monitoring in edge-side adaptive molecular beam epitaxy systemsOA
Contrastive learning for data-efficient substrate deoxidation monitoring in edge-side adaptive molecular beam epitaxy systems
Yuehao Li;Chao Shen;Wenkang Zhan;Bo Xu;Yazhou Yang;Xu Zhang;Hongchang Wang;Chao Zhao;Haifang Jian
Laboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||School of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,ChinaLaboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||School of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,ChinaLaboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||School of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,ChinaLaboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||School of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,ChinaLaboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||School of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,ChinaSchool of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,China||School of Electronic,Electrical and Communication Engineering,University of the Chinese Academy of Sciences,Beijing 101804,ChinaLaboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||School of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,ChinaLaboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||School of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,ChinaLaboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||School of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,China
contrastive learningmolecular beam epitaxyreal-time controlreflection high-energy electron diffraction
contrastive learningmolecular beam epitaxyreal-time controlreflection high-energy electron diffraction
《半导体学报（英文版）》 2026 (3)
28-37,10
This work was supported by the Beijing Natural Science Foundation(Grant Nos.F251036 and L248103),CAS Project for Young Scientists in Basic Research(Grant Nos.YSBR-090 and YSBR-05),and National Natural Science Foundation of China(Grant No.62274159).
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