AlScN:characteristics,micro/nano fabrication and multiple applicationsOA
AlScN:characteristics,micro/nano fabrication and multiple applications
Shihang Liu;Jinfeng Gao;Jiajie Pan;Lin Li;Hanxiang Jia;Shuangzan Lu;Maowei Zhang;Bo Zhao;Jun Liu
Hubei Jiufengshan Laboratory,Wuhan 430074,ChinaHubei Jiufengshan Laboratory,Wuhan 430074,ChinaHubei Jiufengshan Laboratory,Wuhan 430074,China||School of Science,Hubei University of Technology,Wuhan 430068,ChinaHubei Jiufengshan Laboratory,Wuhan 430074,ChinaHubei Jiufengshan Laboratory,Wuhan 430074,ChinaHubei Jiufengshan Laboratory,Wuhan 430074,ChinaHubei Jiufengshan Laboratory,Wuhan 430074,ChinaHubei Jiufengshan Laboratory,Wuhan 430074,ChinaHubei Jiufengshan Laboratory,Wuhan 430074,China
aluminum scandium nitridematerial propertiesmicro/nano fabricationdevice integration
aluminum scandium nitridematerial propertiesmicro/nano fabricationdevice integration
《半导体学报（英文版）》 2026 (3)
10-27,18
This work was supported by the National Natural Sci-ence Foundation of China(General Program,No.52473331).
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