θ-TaN:Redefining the thermal conductivity limit of metallic materialsOA
θ-TaN:Redefining the thermal conductivity limit of metallic materials
Miao-Ling Lin;Ping-Heng Tan
State Key Laboratory of Semiconductor Physics and Chip Technologies,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Semiconductor Physics and Chip Technologies,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
《半导体学报（英文版）》 2026 (3)
6-9,4
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