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共溅射Ti-Ta合金涂层的耐腐蚀性能分析OA

Analysis of corrosion resistance of co-sputtered Ti-Ta alloy coatings

中文摘要英文摘要

Ti-Ta合金涂层可用于骨科和牙科植入体的表面改性.为了提高Ti-Ta合金涂层耐蚀性,采用反应磁控共溅射技术沉积制备了Ti-Ta合金涂层,在衬底温度200℃时,恒定Ti靶溅射功率,研究Ta靶不同溅射功率(50、100、150、200 W)对Ti-Ta合金涂层的相组成、微观形貌以及电化学腐蚀性能的影响.结果表明,随着Ta靶溅射功率的升高,Ti-Ta合金涂层中的Ta含量增加,晶粒长大;当Ta靶溅射功率100 W时,Ti-Ta合金涂层表面出现微观凹坑状结构,且随着Ta溅射功率的增加,其特征更加明显,导致涂层的疏水性不断增强.当Ta溅射功率150 W时,β相逐渐占据主导地位,而随着Ti-Ta合金涂层中β相的增加,以及涂层表面微观凹坑结构的形成,在该功率条件下(150 W),Ti-Ta合金涂层现出最优的耐腐蚀性,其自腐蚀电流密度最小,自腐蚀电位升高,点蚀坑减少;当溅射功率升高至200 W时,Ti-Ta合金涂层表面会出现微裂纹,这一现象显著增加了腐蚀溶液与涂层表面的接触面积,进而导致涂层的耐腐蚀性下降.因此,当Ta靶溅射功率为150 W时,制备的Ti-Ta合金涂层具有较高的疏水性和耐蚀性能,能够对植入体起到良好的保护作用.

Ti-Ta alloy coatings show potential for surface modification of orthopedic and dental implants.To enhance the corrosion resistance of these coatings,Ti-Ta alloy layers were deposited using reactive magnetron co-sputtering.With the substrate temperature maintained at 200℃and the sputtering power of the Ti target held constant,the influence of varying Ta target power(50,100,150,and 200 W)on the phase composition,microstructure,and electrochemical corrosion be-havior of the coatings was systematically investigated.Results indicate that as the Ta sputtering power increased,the Ta content in the coatings rose and grain growth occurred.At the Ta power of 100 W,micro-pitted structures began to appear on the coating surface,becoming more pro-nounced with further increases in power,which contributed to a continuous enhancement in hy-drophobicity.When the Ta power reached 150 W,the β-phase started to dominate.The increased presence of the β-phase,along with the formation of micro-pitted surface structures,endowed the Ti-Ta coating prepared at this power with optimal corrosion resistance:it exhibited the lowest self-corrosion current density,elevated self-corrosion potential,and reduced pitting pits.Howev-er,at a higher power of 200 W,micro-cracks emerged on the coating surface,substantially increas-ing the contact area with the corrosive medium and consequently degrading the corrosion resist-ance.Therefore,the Ti-Ta coating deposited at the Ta target power of 150 W demonstrates supe-rior hydrophobicity and corrosion resistance,offering effective protection for implant applications.

王彦龙;唐中淋;何潘宁

西安工程大学 材料工程学院,陕西 西安 710048西安工程大学 材料工程学院,陕西 西安 710048西安工程大学 材料工程学院,陕西 西安 710048

通用工业技术

Ti-Ta合金涂层共溅射微观结构疏水性耐腐蚀性

Ti-Ta alloy coatingco-sputteringmicrostructurehydrophobicitycorrosion resistance

《西安工程大学学报》 2026 (1)

35-42,8

陕西省自然科学基础研究计划(2023-JC-YB-476)

10.13338/j.issn.1674-649x.2026.01.005

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