宏微运动平台的最优鲁棒跟踪控制算法研究OA

Macro-micro motion stage is a composite precision motion system for providing long-stroke high-precision movement.The micro stage with compliant mechanism support can effectively improve the overall accuracy of the macro-micro motion system since there is no friction.However,such macro-micro motion systems are faced with some problems and challenges,such as coupling internal stress,model parameter uncertainties and control architecture constraints,resulting in limited performance improvement.We propose an optimal robust control algorithm for achieving precision track and control input chattering suppression of the macro-micro motion stage.The overall control frame adopts a two-degree-of-freedom control structure.The feedforward controller is designed based on the nominal dynamic model.The feedback controller is obtained by solving a hybrid H2/H∞optimal decentralized control problem considering model uncertainty.By defining a parameter space,the robust stability constraint and the decentralized feedback constraint are projected into a convex set,then the constrained optimal robust control problem is described as a convex optimization problem to be efficiently solved.Finally,the effectiveness of the proposed algorithm is verified by prototype experiments.