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压电纤维驱动的二自由度跨尺度粘滑运动平台OA

Two-degree-of-freedom cross-scale stick-slip motion platform driven by macro fiber composite

中文摘要英文摘要

针对微操作与微装配领域的多自由度、宏行程以及高精度运动需求,提出压电粘滑驱动的二自由度跨尺度并联式解耦运动平台.采用压电纤维致动柔顺机构,设计驱动-结构一体式拱型驱动单元,实现纳米级运动分辨率、提高单步输出位移并使二维平面运动解耦.然后,利用粘滑驱动原理实现宏行程运动,并采用万向轴承与可调支撑柱提高承载能力.之后,通过有限元法建立平台理论模型,并对其输出位移和固有频率进行仿真分析.最后,搭建实验平台测试相关性能.实验结果表明:连续步进运动时,压电粘滑运动平台沿x、y向平动的最大单步位移分别为249.6 μm和237.3 μm,运动范围为16.10 mm×16.08 mm;即使垂直负载为30 N时,粘滑运动平台仍有16.0 μm的单步输出位移.此外,单步精密运动时,位移分辨率分别为 6.3 nm和 6.8 nm.因此,所设计的压电粘滑运动平台可以满足多维跨尺度微纳运动需求.

Regarding the multi-degree-of-freedom,macro-stroke,and high-precision motion requirements in micro-manipulation and micro-assembly fields,a two-degree-of-freedom cross-scale parallel decoupled motion platform with piezoelectric stick-slip actuation was proposed.Macro fiber composites were used to actuate compliant mechanisms to design an integrated drive-structure arch-shaped driving unit,achieving nanometer-level motion resolution,enhancing single-step output displacement,and enabling two-dimen-sional planar motion decoupling.Subsequently,stick-slip driving principles were utilized to achieve macro-stroke motion,while universal bearings and adjustable support were employed to enhance load-bearing ca-pacity.A theoretical model of the platform was established using the finite element method,and simula-tions were conducted to analyze its output displacement and natural frequency.Finally,an experimental platform was constructed to test the relevant performance.Experimental results show that during continu-ous stRegarding the multi-degree-of-freedom,macro-stroke,and high-precision motion requirements in micro-manipulation and micro-assembly fields,a two-degree-of-freedom cross-scale parallel decoupled mo-tion platform with piezoelectric stick-slip actuation is proposed.Macro fiber composites are used to actuate compliant mechanisms to design an integrated drive-structure arch-shaped driving unit,achieving nanome-ter-level motion resolution,enhancing single-step output displacement,and enabling two-dimensional pla-nar motion decoupling.Subsequently,stick-slip driving principles are utilized to achieve macro-stroke mo-tion,while universal bearings and adjustable support are employed to enhance load-bearing capacity.A theoretical model of the platform is established using the finite element method,and simulations are con-ducted to analyze its output displacement and natural frequency.Finally,an experimental platform was constructed to test the relevant performance.ep motion,the maximum single-step displacements of the piezoelectric stick-slip motion platform along the x and y axes are 249.6 μm and 237.3 μm,respectively,with a motion range of 16.10 mm×16.08 mm.Even under a vertical load of 30 N,the stick-slip motion platform still achieves a single-step output displacement of 16 μm.Additionally,the translational displace-ment resolutions are 6.3 nm and 6.8 nm during single-step precision motion,respectively.Therefore,the designed piezoelectric stick-slip motion platform can meet the multi-dimensional,cross-scale micro-nano motion requirements.

莫衍楠;杨依领;孟恬畅;魏燕定;崔玉国

宁波大学 机械工程与智能制造学院 宁波市微纳运动及智能控制重点实验室,浙江 宁波 315211宁波大学 机械工程与智能制造学院 宁波市微纳运动及智能控制重点实验室,浙江 宁波 315211宁波大学 机械工程与智能制造学院 宁波市微纳运动及智能控制重点实验室,浙江 宁波 315211浙江大学 机械工程学院 全省高端装备制造及检测技术重点实验室,浙江 杭州 310027宁波大学 机械工程与智能制造学院 宁波市微纳运动及智能控制重点实验室,浙江 宁波 315211

机械制造

压电驱动粘滑运动柔顺机构二自由度

piezoelectric actuationstick-slip motioncompliant mechanismtwo degrees of freedom

《光学精密工程》 2026 (4)

571-585,15

国家自然科学基金(No.52575125,No.U23A20618)宁波市重大科技攻关项目(No.2024Z163)

10.37188/OPE.20263404.0571

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