基于模型预测控制的生产线在线抽样检测方法OA
On-line Sampling Detection Method of Production Line Based on Model Predictive Control
在半导体制造场景中,在线检测是生产线大规模量产的必要一环,在线检测与产能释放、良率保障存在耦合关系.提出一种基于模型预测控制的生产线在线抽样检测方法,提出面向产能的切换型极大加代数建模方法及面向产品质量的动态贝叶斯网络建模方法,构建产能、质量及检测成本的性能均衡模型;以检测策略效益最大化为目标函数;提出离散事件模型主导的模型预测控制框架.以某芯片大板级封装产线为案例进行仿真实验,结果表明,在平均合格率差距不大的情况下,产线效益提高,验证了模型和算法的可行性及有效性.所提出的模型可丰富产线性能建模与评估的理论方法,并可应用于流水产线在线检测及生产优化方面的工程问题.
In the semiconductor manufacturing scenario,online detection is a necessary part of large-scale mass production of the production line.There is a coupling relationship between online detection and capacity release and yield guarantee.An online sampling inspection method for production lines based on model predictive control is proposed.A switching maximum plus algebraic modeling method for production capacity and a dynamic Bayesian network modeling method for product quality are proposed.The performance equilibrium model of production capacity,quality and inspection cost is constructed,and the maximum benefit of inspection strategy is taken as the objective function.A model predictive control framework dominated by discrete event model is proposed.Taking a chip large board level packaging production line as a case,simulation experiment is carried out.The results show that the production line efficiency is improved under the condition that the average pass rate gap is not large,and the feasibility and effectiveness of the model and algorithm are verified.The model proposed can enrich the theoretical method of modeling and evaluation of production line performance,and can be applied to the engineering problems of on-line detection and production optimization of flow production line.
马文煊;张定;杨佳峰
广东工业大学机电工程学院,广州 510006广东工业大学机电工程学院,广州 510006广东工业大学机电工程学院,广州 510006
信息技术与安全科学
在线抽样检测模型预测控制产能释放动态贝叶斯网络极大加代数
online sampling inspectionmodel predictive controlcapacity releasedynamic Bayesian networkmax-plus algebra
《机电工程技术》 2026 (2)
1-10,10
国家重点研发计划(2024YFB3312400)国家自然科学基金(72271067)
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