薄膜热扩散率测量技术研究进展OA

Thin films,due to their unique physical,chemical,and mechanical properties,play a crucial role in the development of modern high-tech industries,and the precise understanding of their thermal properties is becoming increasingly important.Thermal diffusivity refers to the ability of a material to approach a uniform temperature under a temperature gradient,reflecting the heat transfer process of an object under non-steady-state conditions.Accurate measurement of the thermal diffusivity of thin films is of great significance for material science and engineering applications.Unlike bulk materials,the measurement of thermal diffusivity for thin films is more difficult,and the requirements for measurement technology are more stringent,which necessitates the development of new methods or the improvement of existing technologies.The measurement techniques for the thermal diffusivity of thin films are mainly based on the photoacoustic and photothermal effects.Based on the methods for measuring the thermal diffusivity of thin films in recent years,the measurement techniques for the in-plane and cross-plane directions of thin films are reviewed,providing a reference for future research and development of thin film measurement techniques.