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用于精密驱动的双足压电执行器设计OA

Design of Bipedal Piezoelectric Actuator for Precision Driving

中文摘要英文摘要

压电执行器因其独特的工作原理和优越的性能受到广泛关注,并在许多领域得到了应用,如航空航天、微电子、医疗器械等.针对压电执行器的定动子接触特性难以精确定量建模分析,影响系统性能如速度、带载能力等进一步提升的问题,对双足直线型压电执行器展开研究,提出并验证了一种弯曲振动方程与有限元数值分析相结合的结构优化方案.基于逆压电效应与等截面梁自由弯曲振动方程,分析了定子振动模态与驱动机制.在 SolidWorks 中构建三维模型,通过 ANSYS Workbench 进行有限元仿真,分析定动子接触性能(驱动足法向振幅及系统输出特性等);基于仿真数据优化结构设计,并验证系统的带载能力.仿真结果表明,当驱动电压为100 V时,所设计执行器的左、右驱动足最大法向位移振幅分别为14 μm与7.5 μm,动子输出速度为156 mm/s(空载),所对应的最大带载能力为10 N.

Piezoelectric actuators have received widespread attention due to their unique working principle and superior performance,and have been widely applied in many fields such as aerospace,microelectron-ics,and medical devices.It is difficult to accurately and quantitatively model and analyze the contact char-acteristics of the piezoelectric actuator,which affects the further improvement of system performance such as speed and load capacity.This article focuses on the research of a bipedal linear piezoelectric actuator and proposes and validates a structural optimization scheme that combines bending vibration equations with finite element numerical analysis.Based on the inverse piezoelectric effect and the equation of free bending vibration of equal section beams,the stator vibration modes and driving mechanisms are analyzed.Solid-Works software is used for 3D modeling,and ANSYS Workbench analysis tool is utilized for numerical simulation analysis of the contact performance of the stator,including the normal amplitude and output characteristics of the driving foot,further optimizing the system structure based on simulation data,and finally verifying the load-bearing capacity.The simulation results show that when the driving voltage is 100 V,the maximum normal displacement amplitudes of the left and right driving feet of the designed piezoelectric actuator are 14 μm and 7.5 μm,respectively.The no-load output speed of the rotor is 156 mm/s,and the maximum load capacity is 10 N.

亓雪;陈昱廷;赵美婷;张丽娜;谭秋林

中北大学 微纳器件与系统教育部重点实验室,山西 太原 030051||中北大学 极限环境光电动态测试技术与仪器全国重点实验室,山西 太原 030051中北大学 极限环境光电动态测试技术与仪器全国重点实验室,山西 太原 030051中北大学 微纳器件与系统教育部重点实验室,山西 太原 030051||中北大学 极限环境光电动态测试技术与仪器全国重点实验室,山西 太原 030051中北大学 微纳器件与系统教育部重点实验室,山西 太原 030051||中北大学 极限环境光电动态测试技术与仪器全国重点实验室,山西 太原 030051中北大学 微纳器件与系统教育部重点实验室,山西 太原 030051||中北大学 极限环境光电动态测试技术与仪器全国重点实验室,山西 太原 030051

信息技术与安全科学

压电执行器有限元分析结构优化数值仿真

piezoelectric actuatorfinite element analysisstructural optimizationsimulation analysis

《测试技术学报》 2026 (1)

55-62,8

山西省基础研究计划青年项目(202303021222112)国家重点研发计划资助项目(2023YFB3209100)国家自然科学基金资助项目(U24A20136)

10.62756/csjs.1671-7449.2026019

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