基于分数阶滑模自抗扰的压电定位台轨迹跟踪控制OA

To achieve high-precision tracking of the piezoelectric positioning stage,a fractional-order ter-minal sliding mode active disturbance rejection controller was developed to address hysteresis,model un-certainties,and load disturbances.By integrating fractional-order theory,terminal sliding mode,and ac-tive disturbance rejection,the controller ensured finite-time error convergence.A continuous and differen-tiable reaching law based on an improved fal nonlinear function was introduced to suppress chattering.Ex-perimental results show that for a 10 μm sinusoidal trajectory under a 200 g load,the controller attains a root mean square error of 0.024 6 μm,improving accuracy by 76.66%,48.00%,and 43.32%compared with PID,integer-order terminal sliding mode,and neural-network-based integer-order terminal sliding mode control,respectively.Under a 40 Hz reference signal,it reduces the average tracking error to 0.186 9 μm.The controller maintains excellent tracking across varying loads,effectively suppresses chat-tering,and exhibits strong robustness to model uncertainties and load disturbances.