High-speed wavelength division multiplexing silicon photonics receiver chip based on silicon arrayed waveguide gratingOA
High-speed wavelength division multiplexing silicon photonics receiver chip based on silicon arrayed waveguide grating
Zhipeng Liu;Yiling Hu;Zhi Liu;Jiashun Zhang;Jun Zheng;Xiaojie Yin;Yuhua Zuo;Junming An;Buwen Cheng
State Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||College of Materials Science and Opto-electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||College of Materials Science and Opto-electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||College of Materials Science and Opto-electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||College of Materials Science and Opto-electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||College of Materials Science and Opto-electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||College of Materials Science and Opto-electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||College of Materials Science and Opto-electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||College of Materials Science and Opto-electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||College of Materials Science and Opto-electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China
silicon photonicsWDMAWGphotodetector
silicon photonicsWDMAWGphotodetector
《半导体学报（英文版）》 2026 (2)
72-78,7
National Key Research and Development Program of China(2022YFB2802400)National Natural Science Founda-tion of China(62250010,62090054,62274160)Youth Innova-tion Promotion Association of the Chinese Academy of Sci-ences(2021111).
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