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Identification of H2 and NH3 gases using calorimetric signals and transient response through machine learningOA

Identification of H2 and NH3 gases using calorimetric signals and transient response through machine learning

Wenxin Luo;Yingcong Zheng;Yijun Liu;Mingjie Li

School of Integrated Circuits,Guangdong University of Technology,Guangzhou 510006,ChinaSchool of Integrated Circuits,Guangdong University of Technology,Guangzhou 510006,ChinaSchool of Integrated Circuits,Guangdong University of Technology,Guangzhou 510006,ChinaSchool of Integrated Circuits,Guangdong University of Technology,Guangzhou 510006,China

MOS sensorgas identificationMEMS technologyalgorithm analysis

MOS sensorgas identificationMEMS technologyalgorithm analysis

《半导体学报(英文版)》 2026 (2)

51-59,9

This work was supported in part by the National Natural Science Foundation of China(62431018),in part by the Guangzhou Municipal Science and Technology Bureau(SL2023A04J00435),and in part by the One Hundred Youth Project of Guangdong University of Technology(263113873).Technical assistance for sensing feature extraction and par-tial visualization(under guidance)provided by X.Wang is appreciated.

10.1088/1674-4926/25040018

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