Impact of fluorine plasma and electrothermal annealing on the interfacial properties at Ni/β-Ga2O3 Schottky contactsOA
Impact of fluorine plasma and electrothermal annealing on the interfacial properties at Ni/β-Ga2O3 Schottky contacts
Jianggen Zhu;Qi Zhou;Jiaren Feng;Shuting Huang;Ning Yang;Binju Qiu;Enchuan Duan;Sheng Liu;Bo Zhang;Zhaofu Zhang
School of Integrated Circuit Science and Engineering,University of Electronic Science and Technology of China(UESTC),Chengdu 610054,ChinaSchool of Integrated Circuit Science and Engineering,University of Electronic Science and Technology of China(UESTC),Chengdu 610054,China||Shenzhen Institute for Advanced Study,UESTC,Shenzhen 518110,China||Institute of Electronic and Information Engineering,UESTC,Dongguan 523808,ChinaSchool of Integrated Circuits,Wuhan University,Wuhan 430072,ChinaSchool of Integrated Circuit Science and Engineering,University of Electronic Science and Technology of China(UESTC),Chengdu 610054,ChinaSchool of Integrated Circuit Science and Engineering,University of Electronic Science and Technology of China(UESTC),Chengdu 610054,ChinaSchool of Integrated Circuit Science and Engineering,University of Electronic Science and Technology of China(UESTC),Chengdu 610054,ChinaSchool of Integrated Circuit Science and Engineering,University of Electronic Science and Technology of China(UESTC),Chengdu 610054,ChinaSchool of Integrated Circuits,Wuhan University,Wuhan 430072,ChinaSchool of Integrated Circuit Science and Engineering,University of Electronic Science and Technology of China(UESTC),Chengdu 610054,ChinaSchool of Integrated Circuits,Wuhan University,Wuhan 430072,China||Suzhou Institute of Wuhan University,Suzhou 215123,China||Research Institute of Wuhan University in Shenzhen,Shenzhen 518057,China
Ni/β-Ga2O3 interfacefirst-principles calculationsSchottky contactfluorine plasmaelectrothermal annealing
Ni/β-Ga2O3 interfacefirst-principles calculationsSchottky contactfluorine plasmaelectrothermal annealing
《半导体学报（英文版）》 2026 (2)
22-31,10
This work was supported by the National Natural Sci-ence Foundation of China(Grant Nos.62174019,52302046,L2424216),the Guangdong Basic and Applied Basic Research Foundation(Grant No.2024A1515012139),the Major Pro-gram(JD)of Hubei Province(Grant No.2023BAA009),the Knowledge Innovation Program of Wuhan-Shuguang Project(Grant No.2023010201020262),the Basic Research Program of Jiangsu(Grant No.BK20230268).
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