Demonstration of InSnO thin-film transistors with superior uniformity and reliability utilizing SiO2 passivationOA
Demonstration of InSnO thin-film transistors with superior uniformity and reliability utilizing SiO2 passivation
Tingrui Huang;Wangran Wu;Jie Cao;Zuoxu Yu;Yuzhen Zhang;Wenting Xu;Xifeng Li;Cong Peng;Weifeng Sun;Guangan Yang
School of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaKey Laboratory of Advanced Display and System Applications of the Ministry of Education,Shanghai University,Shanghai 200072,ChinaKey Laboratory of Advanced Display and System Applications of the Ministry of Education,Shanghai University,Shanghai 200072,ChinaSchool of Integrated Circuits and National ASIC System Engineering Research Center,Southeast University,Nanjing 210096,ChinaSchool of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,China
thin film transistorreliabilityInSnOSiO2
thin film transistorreliabilityInSnOSiO2
《半导体学报（英文版）》 2026 (2)
14-21,8
The work is supported in part by the National Natural Sci-ence Foundation of China(62404110,62274033),Natural Sci-ence Foundation of Jiangsu Province(BK20221453),Fundamen-tal Research Funds for the Central Universities,and Natural Sci-ence Research Start-up Foundation of Recruiting Talents of Nanjing University of Posts and Telecommunications(NY223159).
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