基于微焦点光源的X射线椭球聚焦镜设计OA

X-ray ellipsoidal focusing mirror is a key device in systems such as microscopic imaging,microbeam diffraction,synchrotron radiation light source,and so on.Based on Hamamatsu L9421-02 micro-focus light source,an ellipsoidal focusing mirror suitable for table-level X-ray instruments is designed in this work.8 keV is selected as the design energy for the mirror.According to the characteristics of reflection,focusing and manufacturing process,the size range and design requirements of the ellipsoidal mirror are analyzed,and a dimension design flow based on parameter scanning is proposed.Then,by using the equivalent interface method,the X-ray reflectivity of the optical thin film system is studied for the ellipsoidal mirror,and the structure of the reflecting film is determined.Finally,the optimal design schemes of two groups of single-layer gold film ellipsoidal mirrors and two groups of tungsten-silicon multilayer film ellipsoidal mirrors are proposed,with a length of 50 mm and a diameter of about 2-10 mm.The design of the size and the films is the prerequisite for the manufacturing,testing and instrument development of ellipsoidal mirrors,and the complete design idea also offers valuable reference for the personalized customization of ellipsoidal mirrors.