高功率GaN基蓝光二极管激光器性能退化实验研究OA
Research on influence factors of high power GaN blue diode laser performance degradation
高功率GaN基蓝光二极管激光器在工业加工、铜材料焊接、3D打印和水下激光通信等技术领域有着广泛的应用前景.蓝光二极管激光芯片COS单元器件具有热阻低和尺寸小的优点,但是该器件存在可靠性较低的问题,导致其在工业化应用中受到一定限制,因此对其性能退化因素进行深入研究.基于光学显微技术、扫描电子显微表征和能谱分析手段对经过长时老化考核后器件的性能退化因素进行分析研究.实验研究和分析表明,GaN基体材料缺陷、腔面多余物沉积和光化学腐蚀是导致蓝光二极管激光芯片性能退化的主因,同时良好的气密性封装可提高二极管激光芯片的可靠性.
[Background]High power GaN-based blue diode lasers have wide application prospects in industrial processing,copper material welding,3D printing,underwater laser communication and other technical fields.The Chip On Submount(COS)unit packaged in the heat sink is a kind of single component that can be applied to the fabrication of high power GaN-based blue diode lasers.The device has the advantages of low thermal resistance and small size.[Purpose]However,due to the low reliability of this device,the industrial application of this COS single component in high power GaN-based blue diode lasers is still limited to a certain extent,and its performance degradation factors need to be studied.[Methods]In this paper,based on optical microscopy,scanning electron microscopy(SEM)and energy dispersive spectroscopy(EDS),the degradation factors of high power blue light COS components were studied.[Results]Experimental study and analysis show that the performance degradation factors of blue light diode laser chip are mainly related to defects in the GaN matrix material,residual deposition on the cavity surface and photochemical corrosion.Through comparative experiments,it is demonstrated that the reliability of high power blue COS single components can be improved by hermetic packaging,which provides a reference for the subsequent engineering application of high power blue COS units.[Conclusions]Finally,experimental research and analysis indicate that the performance degradation factors of high-power blue laser diodes(LDs)are primarily related to defects in the GaN substrate material,foreign matter deposition on the cavity surface,and photochemical corrosion factors.Comparative experiments further reveal that the threshold current growth rate of LDs with gas sealing(about 0.14 mA/h)is lower than that of non-gas-sealed LDs(about 0.27 mA/h).This demonstrates that gas-sealed packaging of high-power blue LD COS units devices can enhance their reliability.
谢鹏飞;张永刚;王丞乾;吕文强;武德勇;郭林辉;雷军;王昭;高松信
中国工程物理研究院 应用电子学研究所,四川 绵阳 621900||先进激光与高功率微波全国重点实验室,四川 绵阳 621900中国工程物理研究院 应用电子学研究所,四川 绵阳 621900||先进激光与高功率微波全国重点实验室,四川 绵阳 621900中国工程物理研究院 应用电子学研究所,四川 绵阳 621900||先进激光与高功率微波全国重点实验室,四川 绵阳 621900中国工程物理研究院 应用电子学研究所,四川 绵阳 621900||先进激光与高功率微波全国重点实验室,四川 绵阳 621900中国工程物理研究院 应用电子学研究所,四川 绵阳 621900||先进激光与高功率微波全国重点实验室,四川 绵阳 621900中国工程物理研究院 应用电子学研究所,四川 绵阳 621900||先进激光与高功率微波全国重点实验室,四川 绵阳 621900中国工程物理研究院 应用电子学研究所,四川 绵阳 621900||先进激光与高功率微波全国重点实验室,四川 绵阳 621900中国工程物理研究院 应用电子学研究所,四川 绵阳 621900||先进激光与高功率微波全国重点实验室,四川 绵阳 621900中国工程物理研究院 应用电子学研究所,四川 绵阳 621900||先进激光与高功率微波全国重点实验室,四川 绵阳 621900
信息技术与安全科学
高功率GaN蓝光二极管激光器性能退化二极管激光器封装气密封
high power GaN blue diode laserperformance degradationdiode laser packaginghermetic packaging
《强激光与粒子束》 2026 (1)
1-7,7
中国工程物理研究院发展基金项目(C-2023JMRH-LG)
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